Advanced Research Systems - Closed Cycle SEM Stage Interface

Closed Cycle SEM Stage Interface

Closed Cycle Interface Cooling Jeol 5800 Sample Stage at National Renewable Energy Lab, Golden, CO.


SEM Image (magnification 35,000) at 35K.	Monochromatic CL image (mag. 35,000) at 35K. 1.580 eV of photon energy

Above images of CdTe thin film used for solar cells.

Photo and above images courtesy of Dr. Manuel J. Romero of National Renewable Energy Lab, Golden, Co.

The system installed at NREL has achieved a minimum temperature of 17.5K.


SEM Image (magnification 1000)	Monochromatic CL image (mag. 2000) taken with a 390 nm Detection Wavelength

The images above are that of an InGaN/GaN quantum well grown on a patterned GaN substrates. The patterning consists of stripes with a periodicity of 10 microns.

"As far as the SEM images are concerned, we find no degradation in image quality between room temperature and 50 K, suggesting that the vibration of the stage is less than ~10 nm."

Above images provided by Professor Dan Rich of the University of Southern California and Ben-Gurion University.

FEATURES
• Cools SEM Stage to 20 – 40K
• Interface customizable to various SEMs and/or port configurations
• Closed cycle cryostat runs continuously – no need to refill with liquid cryogens (LN2 & LHe)
- Electricity is the only utility required
- Air or water cooled compressor
• Cryocooler mechanically decoupled from SEM. Vibration levels of 3 to 5 nanometers displacement at sample are typical.
• Bakeable to 200C
• Wide selection of temperature sensors and instrumentation
• Patent Pending