Ultra Low Vibration Probe Station for Nanoscience

The ARS manufactured PS-NANO Ultra Low Vibration Closed Cycle Cryogenic Probe Station provides stability at the sample plate of 10-20 nm of vibration. The system has the capacity for a temperature range of <5.5 K - 350 K, and is capable of even higher temperatures with the addition of a high temperature interface. Metrology can be conducted on multiple small-scale devices consecutively without breaking vacuum or warming the system.

The ARS PS-NANO Probe Station features up to six DC, RF, or fiber optic probe arms. The probes have a 1-inch or 2-inch measurement area, < 1 μm vibration levels, fast sample cooldown, custom wiring for DC and microwave measurements (0-67 GHz), large optical access, and optional 7:1 or 12.5:1 Zoom with coaxial light.

ARS manufactures both the cryocooler and probe station at our headquarters in Macungie, PA, USA. This integrated approach ensures consistent performance and facilitates diagnostics and service of the complete system.

Applications

• DC, RF properties

• Microwave properties

• MEMS

• Nanoscale electronics

• Superconductivity

• Electrical and optical properties

• Quantum dots and wires

Typical Configuration

• DE-210 Cold Head with ARS-10HW Compressor

• 2x Helium Hoses

• Stainless Steel Vacuum Enclosure

• Nickel Plated OFHC copper Radiation Shield

• 1x High Purity Quartz Window

• 2 in. Diameter Sample Stage

• Up to 6 Micromanipulated Probe Arms

  • DC, RF, or Fiber Optic Probe Options

• 10 Tungsten or Beryllium Copper DC probe tips

• Instrumentation for Temperature Measurement and Control:

  • 19-Pin Hermetic Feedthrough on Vacuum Chamber containing:

    • Curve Matched Silicon Diode for Sample Heat Control

    • 50 Ohm Cartridge Heater for Sample Heat Control

    • Calibrated Silicon Diode for Measurements at the Sample

    • Curve Matched Silicon Diode for Radiation Shield Heat Control

    • 2x 50 Ohm Cartridge Heaters for Sample Heat Control

  • 10 -Pin Hermetic Feedthrough on Instrumentation Skirt Containing

    • Curve Matched Silicon Diode for Cryocooler Diagnostics

• Sample holder for optical and electrical experiments

• Temperature controller

• Low vibration table

• Rotary and Turbo Pumping Systems Available

Features

• <5.5 K Minimum Temperature

• 350 K Maximum Temperature

• 450 K or 800 K Maximum Temperature Upgrade

• 1 in. or 2 in. probe area

• 2.75 in. clear view top window

• Up to 6 micro-manipulated probe arms

• 2 additional accessory ports

• Coaxial or Triaxial DC probes with replaceable tungsten or beryllium copper tips

• 1 µm sensitivity precision actuators

• High stability, spring-loaded linear motion stages

• All stainless-steel vacuum enclosure for low vacuum and fast pumping times

• 7:1 or 12.5:1 zoom microscope with coaxial light

• Super soft copper braids transmit maximum cooling power and minimal vibrations to cold stage

• Heated radiation shield for faster sample change

• Cryogen free

Options & Upgrades

• Probe arms: up to six

  • DC, RF, or Fiber Optic Probe Options

• Temperature:

  • 450K or 800 K high temperature interface

• Sample Plate:

  • Coaxially or triaxially biased sample plate

  • Nanopositioner mounting stages

  • DIP Package sample holders

  • Ring Magnets

• System Configurations:

  • Superconducting magnet upgrade for up to 4 T at the sample

  • Liquid flow, open cycle probe station provides inherently low vibrations

• Sensors and Wiring:

  • Custom wiring configurations available

  • Custom temperature sensor configurations available

  • Cernox sensor upgrades

• Load lock upgrade

• Turbo upgrade for faster cool-down times

• Windows and WD

  • Window material upgrades

  • Custom window materials

  • Anti-reflective window coatings

  • Recessed windows or in-vacuum objectives for low working distance